{"id":277,"date":"2021-04-27T16:07:45","date_gmt":"2021-04-27T07:07:45","guid":{"rendered":"https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/?p=277"},"modified":"2021-04-27T16:07:45","modified_gmt":"2021-04-27T07:07:45","slug":"%e9%ab%98%e6%9c%a8%e7%a0%94%e7%a9%b6%e5%ae%a4","status":"publish","type":"post","link":"https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/?p=277","title":{"rendered":"\u9ad8\u6728\u7814\u7a76\u5ba4"},"content":{"rendered":"\n<h2 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\uff08MOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3001\u6975\u4f4e\u6d88\u8cbb\u96fb\u529b\u6f14\u7b97\u3001AI\u8a08\u7b97\uff09\uff1a\u9ad8\u6728\u4fe1\u4e00<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u5f37\u8a98\u96fb\u4f53\u30b2\u30fc\u30c8\u7d76\u7e01\u819cMOSFET\uff08FeFET\uff09\u3068FeRAM<\/h3>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-1 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<p>\u5206\u6975\u53cd\u8ee2\u3092\u4f34\u3046\u5f37\u8a98\u96fb\u4f53\u3092\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u3068\u3057\u305fMOSFET\uff08FeFET\uff09\u3084\u91d1\u5c5e\u3068\u306e\u30b5\u30f3\u30c9\u30a4\u30c3\u30c1\u69cb\u9020\uff08MFM\u69cb\u9020\uff09\u3092\u30e1\u30e2\u30ea\u30bb\u30eb\u3068\u3059\u308bFeRAM\u306f\u3001\u5c06\u6765\u306e\u6975\u4f4e\u6d88\u8cbb\u96fb\u529b\u30e1\u30e2\u30ea\u3084\u30ed\u30b8\u30c3\u30af\u7528\u7d20\u5b50\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u3002\u7279\u306b\u8fd1\u5e74\u767a\u898b\u3055\u308c\u305fHfZrO2\u3084ZrO2\u306a\u3069\u306e\u5f37\u8a98\u96fb\u4f53\u30fb\u53cd\u5f37\u8a98\u96fb\u4f53\u3092\u7528\u3044\u305f\u30c7\u30d0\u30a4\u30b9\u306f\u3001\u73fe\u5728\u306eSi CMOS\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3068\u306e\u89aa\u548c\u6027\u304c\u6975\u3081\u3066\u9ad8\u304f\u3001\u5927\u304d\u306a\u95a2\u5fc3\u3092\u96c6\u3081\u3066\u3044\u308b\u3002\u3057\u304b\u3057\u306a\u304c\u3089\u3001\u305d\u306e\u7d20\u5b50\u52d5\u4f5c\u3084\u6750\u6599\u7269\u6027\u306f\u4e0d\u660e\u306a\u70b9\u304c\u591a\u304f\u3001\u66f4\u306a\u308b\u9ad8\u6027\u80fd\u5316\u30fb\u9ad8\u4fe1\u983c\u6027\u5316\u3078\u306e\u8981\u6c42\u3082\u9ad8\u3044\u3002\u5f53\u7814\u7a76\u5ba4\u3067\u306f\u3001\u539f\u5b50\u5c64\u5806\u7a4d\uff08ALD\uff09\u6cd5\u306b\u3088\u3063\u3066\u5806\u7a4d\u3057\u305f\u3053\u308c\u3089\u5f37\u8a98\u96fb\u4f53\u8584\u819c\u306e\u7269\u6027\u3084FeFET\u306e\u7d20\u5b50\u52d5\u4f5c\u539f\u7406\u306e\u660e\u78ba\u5316\u3092\u901a\u3058\u3066\u3001\u512a\u308c\u305f\u7d20\u5b50\u7279\u6027\u3092\u5b9f\u73fe\u3059\u308b\u7814\u7a76\u3092\u9032\u3081\u3066\u3044\u308b\u3002<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"849\" height=\"1024\" src=\"https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig1-849x1024.jpg\" alt=\"\" class=\"wp-image-278\" srcset=\"https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig1-849x1024.jpg 849w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig1-249x300.jpg 249w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig1-768x926.jpg 768w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig1.jpg 932w\" sizes=\"(max-width: 849px) 100vw, 849px\" \/><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u5f37\u8a98\u96fb\u4f53\u30c7\u30d0\u30a4\u30b9\u3092\u7528\u3044\u305f\u30ea\u30b6\u30d0\u30fc\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0<\/h3>\n\n\n\n<p>\u8a08\u7b97\u8ca0\u8377\u306e\u8efd\u3044AI\u8a08\u7b97\u624b\u6cd5\u3068\u3057\u3066\u3001\u30ea\u30b6\u30d0\u30fc\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u304c\u8fd1\u5e74\u6ce8\u76ee\u3092\u96c6\u3081\u3066\u3044\u308b\u3002\u5f53\u7814\u7a76\u5ba4\u3067\u306f\u3001\u30e1\u30e2\u30ea\u30fb\u30a4\u30f3\u30fb\u30ed\u30b8\u30c3\u30af\u6a5f\u80fd\u3084\u975e\u7dda\u5f62\u30a2\u30ca\u30ed\u30b0\u8a08\u7b97\u6a5f\u80fd\u3092\u3082\u3064\u5f37\u8a98\u96fb\u4f53\u30b2\u30fc\u30c8MOSFET\uff08FeFET\uff09\u3084FeRAM\u304c\u3001\u30ea\u30b6\u30d0\u30fc\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u7269\u7406\u5b9f\u88c5\u3067\u304d\u308b\u30cf\u30fc\u30c9\u30a6\u30a7\u30a2\u3068\u3057\u3066\u6709\u671b\u3067\u3042\u308b\u3053\u3068\u3092\u63d0\u6848\u3057\u3001\u305d\u306e\u30ea\u30b6\u30d0\u30fc\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u52d5\u4f5c\u3092\u4e16\u754c\u3067\u521d\u3081\u3066\u5b9f\u8a3c\u3057\u3066\u3044\u308b\u3002\u5f37\u8a98\u96fb\u4f53\u30c7\u30d0\u30a4\u30b9\u3092\u7528\u3044\u305f\u3053\u306e\u30ea\u30b6\u30d0\u30fc\u3092\u7528\u3044\u3066\u3001\u6975\u4f4e\u6d88\u8cbb\u96fb\u529b\u3067\u63a8\u8ad6\u30fb\u5b66\u7fd2\u3092\u884c\u3046\u3053\u3068\u304c\u3067\u304d\u308b\u65b0\u3057\u3044AI\u30cf\u30fc\u30c9\u30a6\u30a7\u30a2\u3092Si\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u4e0a\u306b\u5b9f\u73fe\u3059\u308b\u7814\u7a76\u3092\u884c\u3063\u3066\u3044\u308b\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"681\" src=\"https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig2-1024x681.jpg\" alt=\"\" class=\"wp-image-279\" srcset=\"https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig2-1024x681.jpg 1024w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig2-300x199.jpg 300w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig2-768x511.jpg 768w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig2.jpg 1510w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">3\u6b21\u5143\u96c6\u7a4dCMOS\u306e\u305f\u3081\u306e\u6975\u8584\u819cIII-V-On-Insulator MOSFET<\/h3>\n\n\n\n<p>\u5c06\u6765\u306e\u30ed\u30b8\u30c3\u30afLSI\u306e\u672c\u547d\u30c7\u30d0\u30a4\u30b9\u3057\u3066\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u7e26\u578b\u306b\u7a4d\u5c64\u3057\u305f3\u6b21\u5143\u96c6\u7a4dCMOS\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u3002\u3053\u306e\u3088\u3046\u306a\u7a4d\u5c64\u578bMOSFET\u3092\u5b9f\u73fe\u3059\u308b\u4e0a\u3067\u306f\u3001\u4f4e\u6e29\u3067\u7d20\u5b50\u304c\u4f5c\u88fd\u3067\u304d\u304b\u3064\u9ad8\u3044\u79fb\u52d5\u5ea6\u3084\u6ce8\u5165\u901f\u5ea6\u304c\u671f\u5f85\u3067\u304d\u308bIII-V\u5316\u5408\u7269\u534a\u5c0e\u4f53\u3084Ge\u306a\u3069\u306e\u30c1\u30e3\u30cd\u30eb\u304c\u6709\u671b\u3067\u3042\u308b\u3002\u5f53\u7814\u7a76\u5ba4\u3067\u306f\u30013\u6b21\u5143\u96c6\u7a4dCMOS\u3092\u76ee\u6307\u3057\u3066\u3001Si\u57fa\u677f\u4e0a\u306b\u6975\u8584\u306eIII-V-On-Insulator (III-V-OI)\u69cb\u9020\u3092\u5b9f\u73fe\u3059\u308b\u6280\u8853\u3084\u3053\u306e\u69cb\u9020\u3092\u30c1\u30e3\u30cd\u30eb\u306b\u7528\u3044\u305fIII-V nMOSFET\u306e\u5b9f\u8a3c\u3068\u9ad8\u6027\u80fd\u5316\u3001\u305d\u306e\u96fb\u6c17\u7279\u6027\u3092\u6c7a\u5b9a\u3057\u3066\u3044\u308b\u30c7\u30d0\u30a4\u30b9\u7269\u7406\u306e\u7814\u7a76\u3092\u9032\u3081\u3066\u3044\u308b\u3002smart cut\u6cd5\u306a\u3069\u3092\u7528\u3044\u305f\u30aa\u30ea\u30b8\u30ca\u30ea\u30c6\u30a3\u306e\u9ad8\u3044\u57fa\u677f\u5f62\u6210\u6280\u8853\u3001\u9ad8\u54c1\u8ceaMOS\u754c\u9762\u5236\u5fa1\u6280\u8853\u3001\u63a5\u5408\u5f62\u6210\u6280\u8853\u306a\u3069\u306b\u3088\u308a\u3001\u4e16\u754c\u6700\u9ad8\u30ec\u30d9\u30eb\u306eMOSFET\u6027\u80fd\u3092\u5b9f\u8a3c\u3057\u3001\u4e16\u754c\u7684\u306b\u3082\u9ad8\u3044\u95a2\u5fc3\u3092\u96c6\u3081\u3066\u3044\u308b\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"789\" src=\"https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig3-1024x789.jpg\" alt=\"\" class=\"wp-image-280\" srcset=\"https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig3-1024x789.jpg 1024w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig3-300x231.jpg 300w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig3-768x592.jpg 768w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig3.jpg 1407w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">3\u6b21\u5143\u96c6\u7a4dCMOS\u306e\u305f\u3081\u306e\u6975\u8584\u819cGe-On-Insulator MOSFET<\/h3>\n\n\n\n<p>3\u6b21\u5143\u96c6\u7a4dCMOS\u3078\u306e\u9069\u7528\u3092\u76ee\u6307\u3057\u3066\u3001Si\u57fa\u677f\u4e0a\u306e\u6975\u8584Ge-On-Insulator (GOI)\u69cb\u9020\u3092\u5b9f\u73fe\u3059\u308b\u6280\u8853\u3084\u3053\u308c\u3089\u306e\u69cb\u9020\u3092\u7528\u3044\u305f\u9ad8\u6027\u80fdGOI CMOS\u306e\u5b9f\u73fe\u3068\u6027\u80fd\u5411\u4e0a\u3001\u96fb\u6c17\u7279\u6027\u3092\u6c7a\u5b9a\u3057\u3066\u3044\u308b\u30c7\u30d0\u30a4\u30b9\u7269\u7406\u306e\u7814\u7a76\u3092\u9032\u3081\u3066\u3044\u308b\u3002\u9178\u5316\u6fc3\u7e2e\u6cd5\u30fb\u57fa\u677f\u8cbc\u308a\u5408\u305b\u6cd5\u30fbsmart cut\u6cd5\u306a\u3069\u3092\u6700\u9069\u306a\u30a6\u30a7\u30cf\u9762\u65b9\u4f4d\u3068\u7d44\u307f\u5408\u308f\u305b\u305f\u30aa\u30ea\u30b8\u30ca\u30ea\u30c6\u30a3\u306e\u9ad8\u3044\u57fa\u677f\u5f62\u6210\u6280\u8853\u3001\u79fb\u52d5\u5ea6\u5411\u4e0a\u6280\u8853\u3068\u3057\u3066\u6975\u3081\u3066\u91cd\u8981\u306a\u30c1\u30e3\u30cd\u30eb\u3072\u305a\u307f\u5236\u5fa1\u6280\u8853\u3001\u9ad8\u54c1\u8ceaMOS\u754c\u9762\u5f62\u6210\u6280\u8853\u306a\u3069\u306b\u3088\u308a\u3001\u6975\u8584\u30c1\u30e3\u30cd\u30eb\u306e\u4e0b\u3067\u4e16\u754c\u6700\u9ad8\u79fb\u52d5\u5ea6\u306eMOSFET\u6027\u80fd\u3092\u5b9f\u8a3c\u3057\u3001\u4e16\u754c\u7684\u306b\u3082\u9ad8\u3044\u95a2\u5fc3\u3092\u96c6\u3081\u3066\u3044\u308b\u3002III-V-OI MOSFET\u3068\u7d44\u307f\u5408\u308f\u305b\u305f3\u6b21\u5143CMOS\u306e\u5b9f\u8a3c\u3084MOS\u754c\u9762\u7279\u6027\u30fb\u30ad\u30e3\u30ea\u30a2\u8f38\u9001\u7279\u6027\u3092\u6c7a\u3081\u3066\u3044\u308b\u7269\u6027\u306e\u89e3\u660e\u306b\u3082\u53d6\u308a\u7d44\u307f\u3001\u7d20\u5b50\u7269\u7406\u306e\u78ba\u7acb\u3092\u76ee\u6307\u3057\u3066\u3044\u308b\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"767\" src=\"https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig4-1024x767.jpg\" alt=\"\" class=\"wp-image-281\" srcset=\"https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig4-1024x767.jpg 1024w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig4-300x225.jpg 300w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig4-768x575.jpg 768w, https:\/\/nanotechnet.t.u-tokyo.ac.jp\/kairo\/wp-content\/uploads\/2021\/04\/takagi_fig4.jpg 1426w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">\u91cf\u5b50\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf\u306e\u305f\u3081\u306eSi CMOS\u306e\u6975\u4f4e\u6e29\u3067\u306e\u52d5\u4f5c\u7279\u6027\u306e\u7406\u89e3<\/h3>\n\n\n\n<p>\u91cf\u5b50\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u3067\u306f\u3001\u91cf\u5b50\u30d3\u30c3\u30c8\u3092\u64cd\u4f5c\u3059\u308b\u30c1\u30c3\u30d7\u306b\u52a0\u3048\u3066\u3001\u4fe1\u53f7\u3092\u5236\u5fa1\u3059\u308bCMOS\u96c6\u7a4d\u56de\u8def\u3082\u91cd\u8981\u3067\u3042\u308a\u3001\u91cf\u5b50\u30d3\u30c3\u30c8\u6570\u5411\u4e0a\u306e\u305f\u3081\u306b\u306f\u30014K\u306a\u3069\u306e\u6975\u4f4e\u6e29\u3067\u52d5\u4f5c\u3067\u304d\u308bSi 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